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AS ISO 19319-2006

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AS ISO 19319-2006

Surface chemical analysis - Augur electron spectroscopy and X-ray photoelectron spectroscopy - Determination of lateral resolution, analysis area and sample area viewed by the analyser

Standards Australia

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Table of Contents

1 -  AS ISO 19319-2006 Surface chemical analysis - Augur electron spectroscopy and X-ray photoelectron spectroscopy - Determination of lateral resolution, analysis area and sample area viewed by the analyser
4 -  PREFACE
5 -  CONTENTS
6 -  INTRODUCTION
7 -  1 Scope
7 -  2 Terms and definitions
8 -  3 Symbols and abbreviated terms
8 -  4 Background information on lateral resolution, analysis area, and sample area viewed by the analyser
8 -  4.1 General information
9 -  4.2 Lateral resolution
16 -  4.3 Analysis area
18 -  4.4 Sample area viewed by the analyser
18 -  5 Measurements of lateral resolution, analysis area, and sample area viewed by the analyser
18 -  5.1 General information
19 -  5.2 Lateral resolution
20 -  5.3 Analysis area
20 -  5.4 Sample area viewed by the analyser
22 -  Bibliography

Abstract

Adopts ISO 19319:2003 to provide information for measuring lateral analysis, the analysis area and the sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.

General Product Information

Document Type Standard
Status Current
Publisher Standards Australia
ProductNote Pending Revision indicates that as a result of the Aged Standards review process, the document needs updating. If no project proposal, meeting the quality criteria, is received within the 12 month timeframe, the document shall be withdrawn.
Committee CH-016
Supersedes
  • DR 06453 CP