M00050192
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PRACTICE FOR MEASURING SHEET RESISTANCE OF THIN FILM CONDUCTORS FOR FLAT PANEL DISPLAY MANUFACTURING USING A FOUR-POINT PROBE METHOD
American Society for Testing and Materials
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Availability date: 11/06/2021
CONTAINED IN VOL. 10.04, 2016 Provides methods for measuring sheet electrical resistance of sputtered thin conductive films deposited on large insulating substrates used in making flat panel information displays.
Published | |
Document Type | Standard |
Status | Current |
Publisher | American Society for Testing and Materials |
Pages | |
ISBN | |
Committee | F 01 |