M00054050
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GUIDE FOR DEPTH PROFILING IN AUGER ELECTRON SPECTROSCOPY
American Society for Testing and Materials
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Availability date: 11/06/2021
CONTAINED IN VOL. 03.06, 2015 Defines procedures used for depth profiling in Auger electron spectroscopy.
Published | |
Document Type | Standard |
Status | Current |
Publisher | American Society for Testing and Materials |
ProductNote | Reconfirmed 2015 |
Pages | |
ISBN | |
Committee | E 42 |