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GUIDE FOR ION-CHROMATOGRAPHIC ANALYSIS OF ANIONS IN GRAB SAMPLES OF ULTRAPURE WATER (UPW) IN THE SEMICONDUCTOR INDUSTRY
American Society for Testing and Materials
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Availability date: 11/06/2021
CONTAINED IN VOL. 11.01, 2017 Pertains to ultrapure water that is thought to contain low ppt (parts-per-trillion, weight/weight) levels of anionic contaminants (for example, bromide, chloride, fluoride, nitrate, nitrite, phosphate, and sulfate).
Published | |
Document Type | Standard |
Status | Current |
Publisher | American Society for Testing and Materials |
Pages | |
ISBN | |
Committee | D 19 |