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ASTM D 7980 : 2015

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ASTM D 7980 : 2015

GUIDE FOR ION-CHROMATOGRAPHIC ANALYSIS OF ANIONS IN GRAB SAMPLES OF ULTRAPURE WATER (UPW) IN THE SEMICONDUCTOR INDUSTRY

American Society for Testing and Materials

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Abstract

CONTAINED IN VOL. 11.01, 2017 Pertains to ultrapure water that is thought to contain low ppt (parts-per-trillion, weight/weight) levels of anionic contaminants (for example, bromide, chloride, fluoride, nitrate, nitrite, phosphate, and sulfate).

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Document Type Standard
Status Current
Publisher American Society for Testing and Materials
Committee D 19