Table of Contents

Foreword<br>Introduction<br>1 Scope<br>2 Normative references<br>3 Terms and definitions<br>4 Symbols<br>5 Test setup<br>6 Representative mode<br>7 Visual inspection<br>8 Test description<br>9 Calculation of the measured concentrations<br>10 Calculation of specific emission rate<br>11 Assessment<br>12 Documentation<br>Annex A (informative) - Example calculation for<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;suitability assessment of one equipment<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;(existing installation)<br>Annex B (informative) - Example calculation for<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;suitability assessment of wall material<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;(existing cleanroom/clean zone installation)<br>Annex C (informative) - Suitability assessment of a<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;combination of equipment and floor<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;material in a cleanroom to be designed<br>Bibliography

Abstract

Defines requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration.

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	British Standards Institution
Pages
ISBN
Committee	LBI/30