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BS ISO 22415:2019

M00012516

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BS ISO 22415:2019

Surface chemical analysis. Secondary ion mass spectrometry. Method for determining yield volume in argon cluster sputter depth profiling of organic materials

British Standards Institution

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Abstract

This document specifies a method for measuring and reporting argon cluster sputtering yield volumes of a specific organic material.

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Document Type Standard
Status Current
Publisher British Standards Institution
Committee CII/60