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BS IEC 62047-34:2019
M00012718
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BS IEC 62047-34:2019
Semiconductor devices. Micro-electromechanical devices. Test methods for MEMS piezoresistive pressure-sensitive device on wafer
British Standards Institution
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Abstract
This part of IEC 62047 describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices.
General Product Information
| Document Type | Standard |
| Status | Current |
| Publisher | British Standards Institution |
| ProductNote | THIS IDENTICAL ALSO REFERS-IEC 62047-34 |
| Committee | EPL/47 |