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BS ISO 20146:2019

M00012956

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BS ISO 20146:2019

Vacuum technology. Vacuum gauges. Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges

British Standards Institution

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Abstract

This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which parameters have to be given for CDGs, details their calibration procedure and describes which measurement uncertainties have to be considered when operating these gauges.

General Product Information

Document Type Standard
Status Current
Publisher British Standards Institution
Committee MCE/8/-/4