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Vacuum technology. Standard methods for measuring vacuum-pump performance. Turbomolecular vacuum pumps
British Standards Institution
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Availability date: 11/05/2021
This document, in conjunction with ISO 21360‑1, specifies methods for the measurement of performance characteristics of turbomolecular vacuum pumps. It is applicable to all sizes and all types of turbomolecular vacuum pumps, including those
Published | |
Document Type | Standard |
Status | Current |
Publisher | British Standards Institution |
Pages | |
ISBN | |
Committee | MCE/8/-/4 |