Table of Contents

FOREWORD<br>1 Scope<br>2 Normative references<br>3 Terms and definitions<br>4 Description of trench structures in a micrometer scale<br>5 Description of needle structures in a micrometer scale<br>6 Measurement method<br>Annex A (informative) - Examples of measurement for<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;trench and needle structures in a micrometer scale<br>Annex B (informative) - Uncertainty in dimensional measurement<br>Bibliography

Abstract

Defines descriptions of trench structure and needle structure in a micrometer scale.

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	British Standards Institution
Pages
ISBN
Committee	EPL/47
Supersedes	14/30294910 DC : 0