Table of Contents

Foreword<br>Introduction<br>1 Scope<br>2 Normative references<br>3 Terms and definitions<br>4 General outline of the assessment<br>5 Visual inspection<br>6 Assessment of suitability by airborne particle<br>&nbsp;&nbsp;concentration measurements<br>7 Documentation<br>8 Statement on cleanroom suitability<br>Annex A (informative) - Example for data processing deriving<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;from measurements<br>Annex B (informative) - Additional optional tests<br>Bibliography

Abstract

Describes a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1.

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	British Standards Institution
Pages
ISBN
Committee	LBI/30
Supersedes	14/30280736 DC : 0