Table of Contents

FOREWORD<br>1 Scope<br>2 Terms and definitions<br>Annex A (informative) - Standpoint and criteria in<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;editing this glossary<br>Annex B (informative) - Clause cross-references of<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;IEC 62047-1:2005 and IEC 62047-1:2015<br>Bibliography

Abstract

Describes terms for micro-electromechanical devices including the process of production of such devices.

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	British Standards Institution
Pages
ISBN
Committee	EPL/47
Supersedes	13/30293217 DC : 0 03/107914 DC : DRAFT MAY 2003