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BS ISO 13083 : 2015

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BS ISO 13083 : 2015

SURFACE CHEMICAL ANALYSIS - SCANNING PROBE MICROSCOPY - STANDARDS ON THE DEFINITION AND CALIBRATION OF SPATIAL RESOLUTION OF ELECTRICAL SCANNING PROBE MICROSCOPES (ESPMS) SUCH AS SSRM AND SCM FOR 2D-DOPANT IMAGING AND OTHER PURPOSES

British Standards Institution

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Table of Contents

Foreword<br>Introduction<br>1 Scope<br>2 Normative references<br>3 Terms and definitions<br>4 Symbols and abbreviated terms<br>5 General information<br>6 Measurement of lateral resolution of SCM with<br>&nbsp;&nbsp;the sharp-edge method<br>7 Measurement of lateral resolution of SSRM with<br>&nbsp;&nbsp;the sharp-edge method<br>Annex A (informative) - An example of the measurement<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;of SCM resolution<br>Annex B (informative) - An example of the measurement<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;of SSRM resolution<br>Bibliography

Abstract

Explains a method for measuring the spatial (lateral) resolution of scanning capacitance microscopes (SCMs) or scanning spreading resistance microscopes (SSRMs), which are widely used in imaging the distribution of carriers and other electrical properties in semiconductor devices.

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Document Type Standard
Status Current
Publisher British Standards Institution
Committee CII/60
Supersedes
  • 13/30203227 DC : 0