Table of Contents

Foreword<br>Introduction<br>1 Scope<br>2 Normative references<br>3 Terms and definitions<br>4 Description of the influence quantities<br>Annex A (informative) - Components of a focus variation<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;microscope<br>Annex B (informative) - Relation to the GPS matrix model<br>Bibliography

Abstract

Specifies the metrological characteristics of a particular non-contact method measuring surface texture using a focus variation (FV) sensor.

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	British Standards Institution
Pages
ISBN
Committee	TDW/4
Supersedes	13/30251855 DC : 0