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IEC 62047-32:2019
M00030219
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IEC 62047-32:2019
Semiconductor devices – Micro-electromechanical devices – Part 32: Test method for the nonlinear vibration of MEMS resonators
International Electrotechnical Committee
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Abstract
This part of IEC 62047 specifies the test method and test condition for the nonlinear vibration of MEMS resonators.
General Product Information
| Document Type | Standard |
| Status | Current |
| Publisher | International Electrotechnical Committee |
| Committee | TC 47 |