M00030275
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Integrated circuits - Three dimensional integrated circuits - Part 2: Alignment of stacked dies having fine pitch interconnect
International Electrotechnical Committee
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Availability date: 11/05/2021
This part of IEC 63011 provides specifications of initial alignment and alignment maintenance between multiple stacked integrated circuits during the die bonding process.
Published | |
Document Type | Standard |
Status | Current |
Publisher | International Electrotechnical Committee |
ProductNote | THIS STANDARD ALSO REFERS TO IEC 63011-1, IEC 63011-3 |
Pages | |
ISBN | |
Committee | TC 47 |