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IEC 63011-2:2018

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IEC 63011-2:2018

Integrated circuits - Three dimensional integrated circuits - Part 2: Alignment of stacked dies having fine pitch interconnect

International Electrotechnical Committee

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Abstract

This part of IEC 63011 provides specifications of initial alignment and alignment maintenance between multiple stacked integrated circuits during the die bonding process.

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Document Type Standard
Status Current
Publisher International Electrotechnical Committee
ProductNote THIS STANDARD ALSO REFERS TO IEC 63011-1, IEC 63011-3
Committee TC 47