Table of Contents

FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
4 Test bed of MEMS piezoelectric thin film
5 Thin film under testing
6 Test report
Annex A (informative) - Example of measuring method
        of MEMS piezoelectric thin film
Bibliography

Abstract

Describes measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices.

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	International Electrotechnical Committee
Pages
ISBN
Committee	TC 47