Table of Contents

FOREWORD
INTRODUCTION
1 Scope
2 Normative references
3 Terms and definitions
4 Coordinate system
5 1-D qualification features
6 2-D qualification features
7 Cross-sectional qualification features
8 Registration accuracy
Bibliography

Abstract

Specifies measurement terms and methods related to the critical dimension of features and the registration accuracy of features on rigid plate masters.

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	International Electrotechnical Committee
Pages
ISBN
Committee	TC 119