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IEC 60749-28 : 1ED 2017

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IEC 60749-28 : 1ED 2017

SEMICONDUCTOR DEVICES - MECHANICAL AND CLIMATIC TEST METHODS - PART 28: ELECTROSTATIC DISCHARGE (ESD) SENSITIVITY TESTING - CHARGED DEVICE MODEL (CDM) - DEVICE LEVEL

International Electrotechnical Committee

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Table of Contents

FOREWORD<br>INTRODUCTION<br>1 Scope <br>2 Normative references <br>3 Terms and definitions <br>4 Required equipment <br>5 Periodic tester qualification, waveform records,<br>&nbsp;&nbsp;and waveform verification requirements<br>6 CDM ESD testing requirements and procedures <br>7 CDM classification criteria<br>Annex A (normative) - Verification module (metal<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;disc) specifications and cleaning guidelines for<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;verification modules and testers <br>Annex B (normative) - Capacitance measurement<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;of verification modules (metal discs) sitting on<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;a tester field plate dielectric<br>Annex C (informative) - CDM test hardware and<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;metrology improvements<br>Annex D (informative) - CDM tester electrical<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;schematic<br>Annex E (informative) - Sample oscilloscope setup<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;and waveform<br>Annex F (informative) - Field-induced CDM tester<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;discharge procedures <br>Annex G (informative) - Waveform verification<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;procedures<br>Annex H (informative) - Determining the appropriate<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;charge delay for full charging of a large module<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;or device<br>Annex I (informative) - Electrostatic discharge (ESD)<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;sensitivity testing direct contact charged device<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;model (DC-CDM)<br>Bibliography

Abstract

Describes the procedure for testing, evaluating, and classifying devices and microcircuits according to their susceptibility (sensitivity) to damage or degradation by exposure to a defined field-induced charged device model (CDM) electrostatic discharge (ESD).

General Product Information

Document Type Standard
Status Current
Publisher International Electrotechnical Committee
Committee TC 47