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SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 28: PERFORMANCE TESTING METHOD OF VIBRATION-DRIVEN MEMS ELECTRET ENERGY HARVESTING DEVICES
International Electrotechnical Committee
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Availability date: 11/05/2021
FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
4 Vibration testing equipment
5 Vibration-driven MEMS energy harvesting devices
for testing
6 Test conditions
7 Measuring procedures
8 Test report
Annex A (informative) - Example of measurement for
electret energy harvester
Bibliography
Describes terms and definitions, and a performance testing method of vibration driven MEMS electret energy harvesting devices to determine the characteristic parameters for consumer, industry or any application.
Published | |
Document Type | Standard |
Status | Current |
Publisher | International Electrotechnical Committee |
Pages | |
ISBN | |
Committee | TC 47 |