Table of Contents

FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
4 Description of trench structures in a micrometer
  scale
5 Description of needle structures in a micrometer
  scale
6 Measurement method
Annex A (informative) - Examples of measurement for
        trench and needle structures in a micrometer
        scale
Annex B (informative) - Uncertainty in dimensional
        measurement
Bibliography

Abstract

Defines descriptions of trench structure and needle structure in a micrometer scale.

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	International Electrotechnical Committee
Pages
ISBN
Committee	TC 47