Table of Contents

FOREWORD
INTRODUCTION
1 Scope
2 Normative references
3 Terms and definitions
4 Abbreviations
5 Nanomaterials incorporation into
  electronics fabrication
6 Safety and environmental issues
Bibliography

Abstract

Gives a framework for introducing nanoelectronics into large scale, high volume production in semiconductor manufacturing facilities through the incorporation of nanomaterials (e.g. carbon nanotubes, graphene, quantum dots, etc.).

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	International Electrotechnical Committee
Pages
ISBN
Committee	TC 113