Table of Contents

FOREWORD
1 Scope
2 Normative references
3 Terms, definitions and symbols
4 Principle of bulge test
5 Test apparatus and environment
6 Specimen
7 Test procedure and analysis
8 Test report
Annex A (informative) - Determination of mechanical
        properties
Annex B (informative) - Deformation measurement
        techniques
Annex C (informative) - Example of test piece fabrication:
        MEMS process
Bibliography

Abstract

Defines the method for performing bulge tests on the free-standing film that is bulged within a window.

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	International Electrotechnical Committee
Pages
ISBN
Committee	TC 47