Table of Contents

FOREWORD
Clause
1 Scope and object
2 Normative references
3 Terms
4 Classification of technology analysis
   4.1 First level: General visual inspection
        (AT1 test)
   4.2 Second level: Detailed visual inspection
        (AT2 test)
   4.3 Third level: Scanning electron microscope
        examination under large magnification
        (AT3 test)
   4.4 Fourth level: Construction analysis (AT4
        test)
   4.5 Fifth level: Complementary tests (AT5 test)
5 Failure analysis (AT6 test)
   5.1 Objective
   5.2 Resources
   5.3 Description

Abstract

Gives the methodology for technology and failure analysis in manufacturing integrated circuits. Covers the classification of several levels of technology analysis that can be used for semiconductors and defines for each level: the objective to be performed; the points to be investigated and the tools and techniques needed for currently available technologies to carry out these objectives.

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	International Electrotechnical Committee
Pages
ISBN
Committee	TC 47