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ISO 18516 : 2019

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ISO 18516 : 2019

Surface chemical analysis — Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres.

International Organization for Standardization

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Abstract

This document describes methods for measuring lateral resolution and sharpness in imaging surface chemical analysis.

General Product Information

Document Type Standard
Status Current
Publisher International Organization for Standardization
Committee TC 201
Supersedes
  • ISO 18516 : 2006