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ISO 14644-12 : 2018

M00022240

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ISO 14644-12 : 2018

Cleanrooms and associated controlled environments -- Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration

International Organization for Standardization

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Abstract

This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.

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Document Type Standard
Status Current
Publisher International Organization for Standardization
Committee TC 209