M00022240
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Cleanrooms and associated controlled environments -- Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
International Organization for Standardization
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Availability date: 11/05/2021
This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.
Published | |
Document Type | Standard |
Status | Current |
Publisher | International Organization for Standardization |
Pages | |
ISBN | |
Committee | TC 209 |