Table of Contents

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Requirement of single- and multi-layer reference
  thin films
5 Determination of sputtering rate
Annex A (informative) - Report of international Round
        Robin Test
Annex B (informative) - Prediction of the rates for a wide
        range of other materials through tabulated values
        of sputtering yields
Bibliography

Abstract

Defines a method for the calibration of the sputtered depth of a material from a measurement of its sputtering rate under set sputtering conditions using a single- or multi-layer reference sample with layers of the same material as that requiring depth calibration.

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	International Organization for Standardization
Pages
ISBN
Committee	TC 201
Supersedes	ISO/DIS 17109 : 50.60 (2015)