Table of Contents

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols
5 Characteristics of scanning-probe microscopes
6 Preliminary characterization of the measuring system
7 Calibration of scan axes
8 Report of calibration results
9 Uncertainties of measurement
10 Report of results (form)
Annex A (informative) - Example of superposition of
        disturbing influences in the topography image
Annex B (informative) - Sound investigations: Effects
        of a sound proofing hood
Annex C (informative) - Thermal isolation effect of a
        sound proofing hood/measuring cabin
Annex D (informative) - Handling of contaminations
        in recorded topography images
Annex E (informative) - Step height determination:
        comparison between histogram and
        ISO 5436-1 method
Annex F (normative) - Uncertainty of measurement
        for lateral measurands (pitch, position,
        diameter)
Bibliography

Abstract

Provides methods for characterizing and calibrating the scan axes of scanning-probe microscopes for measuring geometric quantities at the highest level.

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	International Organization for Standardization
Pages
ISBN
Committee	TC 201