Table of Contents

Foreword
Introduction
1 Scope
2 Abbreviated terms
3 Terms and definitions used in the physical
  basis of SEM
4 Terms and definitions used in SEM instrumentation
5 Terms and definitions used in SEM image
  formation and processing
6 Terms and definitions used in SEM image
  interpretation and analysis
7 Terms and definitions used in the measurement
  and calibration of SEM image
  magnification and resolution
Bibliography

Abstract

Describes terms used in the practice of scanning electron microscopy (SEM).

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	International Organization for Standardization
Pages
ISBN
Committee	TC 202
Supersedes	ISO/DIS 22493 : 60.00 (2014)