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ISO 21360-4 : 2018

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ISO 21360-4 : 2018

Vacuum technology -- Standard methods for measuring vacuum-pump performance -- Part 4: Turbomolecular vacuum pumps

International Organization for Standardization

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Abstract

This document, in conjunction with ISO 21360-1, specifies methods for the measurement of performance characteristics of turbomolecular vacuum pumps.

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Document Type Standard
Status Current
Publisher International Organization for Standardization
Committee TC 112