Table of Contents

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 Measurement systems
6 Measurement procedures
7 Measurement uncertainties
8 Reporting results
Annex A (informative) - Schemes of principles of measurement
        systems
Annex B (informative) - Applicability and characteristics of
        the different measurement system
Annex C (informative) - Traceability of the different
        measurement systems to the SI
Bibliography

Abstract

Specifies procedures to measure outgassing rates from components designed for vacuum chambers and of vacuum chambers as a whole.

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	International Organization for Standardization
Pages
ISBN
Committee	TC 112