Table of Contents

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 Parameters for which characterization is required or
  recommended for the different applications
6 Vacuum systems to characterize QMS
7 Characterization and calibration procedures
8 Measurement uncertainties
9 Reporting results
Annex A (informative) - Estimate of gas composition in the
        measurement chamber from known gas composition
        in the reservoir in front of a leak element under
        different flow conditions
Bibliography

Abstract

Defines procedures to characterize quadrupole mass spectrometers (QMSs) with an ion source of electron impact ionization and which are designed for the measurement of atomic massto-charge ratios m/z < 300.

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	International Organization for Standardization
Pages
ISBN
Committee	TC 112