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ISO/DIS 21360-4 : 60.00 (2018)

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ISO/DIS 21360-4 : 60.00 (2018)

VACUUM TECHNOLOGY - STANDARD METHODS FOR MEASURING VACUUM-PUMP PERFORMANCE - PART 4: TURBOMOLECULAR VACUUM PUMPS

International Organization for Standardization

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Table of Contents

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 Test methods
6 Test report
Annex A (informative) - Derivation of
        Formulae (4) and (5)
Bibliography

Abstract

Describes methods for the measurement of performance characteristics of turbomolecular vacuum pumps.

General Product Information

Document Type Standard
Status Current
Publisher International Organization for Standardization
Committee TC 112