Table of Contents

Foreword<br>Introduction<br>1 Scope<br>2 Normative references<br>3 Terms and definitions<br>4 Abbreviated terms<br>5 Deposition<br>6 Classification<br>7 Polymer-like carbon films<br>8 Amorphous carbon films<br>9 Diamond films<br>10 Graphite films<br>Annex A (informative) - Deposition methods<br>Annex B (informative) - Characterization methods<br>Bibliography

Abstract

Defines classification, designations and short names for carbon based films.

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	International Organization for Standardization
Pages
ISBN
Committee	TC 107
Supersedes	ISO/DIS 20523 : 60.00 (2017)