Table of Contents

Foreword<br>Introduction<br>1 Scope<br>2 Normative references<br>3 Terms and definitions<br>4 Test environment<br>5 Roughness measurement specimens<br>6 Test apparatus<br>7 Test apparatus calibration<br>8 Probe-tip diameter evaluation standard plate<br>9 Calibration of X-Y and Z scan axes<br>10 Probe-tip error evaluation<br>11 Roughness measurements of specimen<br>12 Test report<br>Annex A (normative) - Determination of D from D'<br>Annex B (informative) - Method to determine criteria<br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;for probe-tip error<br>Bibliography

Abstract

Specifies a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy, of surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, RSm, in the range of about 0,04 [Mu]m to 2,5 [Mu]m.

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	International Organization for Standardization
Pages
ISBN
Committee	TC 206
Supersedes	ISO/DIS 19606 : 50.00 (2016)