Table of Contents

Foreword
Introduction
1 Scope
2 Terms and definitions
3 Descriptions of the influence quantities
Annex A (informative) - Overview and components of a
        coherence scanning interferometry (CSI) microscope
Annex B (informative) - Coherence scanning interferometry
        (CSI) theory of operation
Annex C (informative) - Spatial resolution
Annex D (informative) - Example procedure for estimating
        surface topography repeatability
Annex E (informative) - Relation to the GPS matrix model
Bibliography

Abstract

Describes the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	International Organization for Standardization
Pages
ISBN
Committee	TC 213
Supersedes	ISO/DIS 25178-604 : 60.00 (2013)