Table of Contents

Foreword<br>1 Scope<br>2 Normative references<br>3 Terms and definitions<br>4 Classification<br>5 Measuring and monitoring the cleanliness of <br>&nbsp;&nbsp;surfaces for chemical contamination and <br>&nbsp;&nbsp;demonstration of compliance<br>Annex A (informative) - Conversion between different <br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;unit expressions of surface concentration for <br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;chemical substances<br>Annex B (informative) - Parameters influencing testing <br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;and interpretation of results<br>Annex C (informative) - Essential considerations for <br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;a good cleanliness assessment<br>Annex D (informative) - Methods for testing surface <br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;cleanliness by chemical concentration<br>Annex E (informative) - Test record documentation<br>Bibliography

Abstract

Describes the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles).

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	International Organization for Standardization
Pages
ISBN
Committee	TC 209
Supersedes	ISO/DIS 14644-10 : 60.00 (2013)