Table of Contents

Foreword
Introduction
1 Scope
2 Normative references
3 Terms, definitions, symbols and abbreviated terms
4 System requirements
5 Ion beam alignment methods
6 When to align and check ion beam alignment
Annex A (informative) - Comparison of AES depth profiles
        with good/poor ion beam alignment
Annex B (informative) - Alignment using cup with co-axial
        electrodes
Bibliography

Abstract

Describes methods for the alignment of the ion beam to ensure good depth resolution in sputter depth profiling and optimal cleaning of surfaces when using inert gas ions in Auger electron spectroscopy and X-ray photoelectron spectroscopy.

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	International Organization for Standardization
Pages
ISBN
Committee	TC 201
Supersedes	ISO/DIS 16531 : 40.60 (2012)