Table of Contents

Foreword
Introduction
1 Scope
2 Symbols and abbreviations
3 Outline of method
4 Procedure for evaluating the intensity linearity
5 Interval for repeat measurements
Annex A (normative) - Computation of raster size,
        ion beam current, number of frames for
        analysis, and counts per pulse
Annex B (normative) - Charge compensation setting
Annex C (normative) - Ion detector setting
Annex D (informative) - Instrumental factors
        affecting linearity
Bibliography

Abstract

Defines a method for determining the maximum count rate for an acceptable limit of divergence from linearity of the intensity scale in single ion counting time-of-flight (TOF) secondary ion mass spectrometers using a test based on isotopic ratios in spectra from poly(tetrafluoroethylene) (PTFE).

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	International Organization for Standardization
Pages
ISBN
Committee	TC 201
Supersedes	ISO/DIS 17862 : 40.99 (2013)