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ISO 15632 : 2012

M00027535

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ISO 15632 : 2012

MICROBEAM ANALYSIS - SELECTED INSTRUMENTAL PERFORMANCE PARAMETERS FOR THE SPECIFICATION AND CHECKING OF ENERGY-DISPERSIVE X-RAY SPECTROMETERS FOR USE IN ELECTRON PROBE MICROANALYSIS

International Organization for Standardization

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Table of Contents

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Requirements
5 Check of further performance parameters
Annex A (normative) - Measurement of line widths
        (FWHMs) to determine the energy resolution of
        the spectrometer
Annex B (normative) - Determination of the L/K
        ratio as a measure for the energy dependence
        of the instrumental detection efficiency
Bibliography

Abstract

Describes the most important quantities that characterize an energy-dispersive X-ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts.

General Product Information

Document Type Standard
Status Current
Publisher International Organization for Standardization
ProductNote This standard also refers to ANSI/IEEE 759
Committee TC 202
Supersedes
  • ISO/DIS 15632 : 60.00 (2012)
  • ISO 15632 : 2002