Table of Contents

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions and abbreviated terms
4 Measurement method
5 Requirements
6 Measurement procedures
7 Measurement report
Annex A (normative) - Image correlation method
Annex B (normative) - Characteristic-marker method
Annex C (normative) - Non-periodic grating method
Annex D (informative) - Guidance to users
Annex E (informative) - Instrumental parameters to
        consider to reduce drift rates
Annex F (informative) - Example of drift results
        and analysis
Bibliography

Abstract

Describes terms and specifies measurement methods for characterizing the drift rates of scanning-probe microscopy (SPM) instruments in the X- and Y-directions and, for SPM instruments measuring topography, the drift rate in the Z-direction.

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	International Organization for Standardization
Pages
ISBN
Committee	TC 201
Supersedes	ISO/DIS 11039 : 60.00 (2012)