Table of Contents

Foreword
Introduction
1 Scope
2 Terms and definitions
3 Symbols and abbreviated terms
4 Principle of QMS
5 Specifications for a QMS to be provided
  by manufacturers
6 Optional specifications for QMS to be
  provided by manufacturers
Bibliography

Abstract

Describes terms relevant to quadrupole mass spectrometers (QMSs) and specifies the parameters required for specification by QMS manufacturers necessary for proper calibration and for maintaining the quality of partial pressure measurement.

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	International Organization for Standardization
Pages
ISBN
Committee	TC 112
Supersedes	ISO/DIS 14291 : 60.00 (2012)