Table of Contents

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Steps for acquisition of an SEM image
5 Acquisition of an SEM image and selection of an area
  within the image
6 Evaluation methods
7 Test report
Annex A (normative) - Details of contrast-to-noise ratio
        (CNR)
Annex B (normative) - Details of the Fourier transform
        (FT) method
Annex C (normative) - Details of the contrast-to-gradient
        (CG) method
Annex D (normative) - Details of the derivative (DR) method
Annex E (informative) - Background to evaluation of image
        sharpness
Annex F (informative) - Characteristics and suitability of
        the various evaluation methods
Annex G (informative) - Method of preparing test specimens
        for evaluating image sharpness
Annex H (informative) - Example of test report
Bibliography

Abstract

Describes methods of evaluating the sharpness of digitized images generated by a scanning electron microscope (SEM) by means of a Fourier transform (FT) method, a contrast-to-gradient (CG) method and a derivative (DR) method.

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	International Organization for Standardization
Pages
ISBN
Committee	TC 202
Supersedes	ISO/DIS 24597 : 40.92 (2009)