Table of Contents

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Specimen preparation
5 Preliminary precautions
6 Analysis procedure
7 Data reduction
Annex A (informative) - The assignment of spectral peaks
        to their elements
Annex B (informative) - Peak identity/interferences
Annex C (informative) - Factors affecting the uncertainty
        of a result
Annex D (informative) - Analysis of elements with atomic
        number < 11
Annex E (informative) - Example data from a reproducibility
        study within a laboratory and between laboratories
Bibliography

Abstract

Provides guidance on the quantitative analysis at specific points or areas of a specimen using energy-dispersive spectrometry (EDS) fitted to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA); any expression of amount, i.e. in terms of percent (mass fraction), as large/small or major/minor amounts is deemed to be quantitative.

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	International Organization for Standardization
Pages
ISBN
Committee	TC 202
Supersedes	ISO/DIS 22309 : 50.60 (2011)