Table of Contents

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 General
5 Interface definitions
Annex A (normative) - Tests procedure for fixation
                      interface, p[R]
Bibliography

Abstract

Describes provisions for the interface between end effector and handling systems in production equipment for microsystems.

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	International Organization for Standardization
Pages
ISBN
Committee	TC 39