Table of Contents

Foreword<br>1 Scope<br>2 Normative references<br>3 Principle<br>4 Apparatus<br>5 Adjusting the glow-discharge spectrometer system settings<br>6 Sampling<br>7 Calibration<br>8 Analysis of test specimens<br>9 Expression of results<br>10 Precision<br>11 Test report<br>Annex A (normative) - Calculation of calibration constants <br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;and quantitative evaluation of depth profiles<br>Annex B (informative) - Suggested spectral lines for <br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;determination of given elements<br>Annex C (informative) - Examples of oxide density and the <br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;corresponding quantity rho[o]<br>Annex D (informative) - Report on interlaboratory testing <br>&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;&nbsp;of metal oxide films<br>Bibliography

Abstract

Specifies a glow-discharge optical-emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.

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Published
Document Type	Standard
Status	Current
Publisher	International Organization for Standardization
Pages
ISBN
Committee	TC 201