M00029253
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VACUUM TECHNOLOGY - VACUUM GAUGES - SPECIFICATIONS FOR HOT CATHODE IONIZATION GAUGES
International Organization for Standardization
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Availability date: 11/05/2021
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 Principle of hot cathode ionization gauge
6 Specifications for hot cathode ionization gauge to be
provided by manufacturers
7 Additional (optional) specifications for hot cathode
ionization gauge to be provided by manufacturers
8 Influences contributing to the measurement uncertainty
with hot cathode ionization gauges
Annex A (informative) - Typical Bayard-Alpert gauge with a
glass envelope
Annex B (informative) - Typical electrical connection of a
Bayard-Alpert gauge
Annex C (informative) - Problems with ionization gauges
Bibliography
Describes terms relating to hot cathode ionization vacuum gauges, and specifies which parameters are given by manufacturers of hot cathode ionization gauges and which measurement uncertainties have to be considered when operating these gauges.
Published | |
Document Type | Standard |
Status | Current |
Publisher | International Organization for Standardization |
Pages | |
ISBN | |
Committee | TC 112 |
Supersedes |
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