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ISO 27894 : 2009

M00029253

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ISO 27894 : 2009

VACUUM TECHNOLOGY - VACUUM GAUGES - SPECIFICATIONS FOR HOT CATHODE IONIZATION GAUGES

International Organization for Standardization

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Table of Contents

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 Principle of hot cathode ionization gauge
6 Specifications for hot cathode ionization gauge to be
  provided by manufacturers
7 Additional (optional) specifications for hot cathode
  ionization gauge to be provided by manufacturers
8 Influences contributing to the measurement uncertainty
  with hot cathode ionization gauges
Annex A (informative) - Typical Bayard-Alpert gauge with a
                        glass envelope
Annex B (informative) - Typical electrical connection of a
                        Bayard-Alpert gauge
Annex C (informative) - Problems with ionization gauges
Bibliography

Abstract

Describes terms relating to hot cathode ionization vacuum gauges, and specifies which parameters are given by manufacturers of hot cathode ionization gauges and which measurement uncertainties have to be considered when operating these gauges.

General Product Information

Document Type Standard
Status Current
Publisher International Organization for Standardization
Committee TC 112
Supersedes
  • ISO/DIS 27894 : 60.00 (2009)