Table of Contents

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Descriptions of the influence quantities
Annex A (informative) - General principles
Annex B (informative) - Spot size and focal
        shift
Annex C (informative) - Beam offset direction
        and maximum acceptable local slope
Annex D (informative) - Features of an areal surface
        texture measuring instrument
Annex E (informative) - Others: Non-measured point
        (autofocus error)
Annex F (informative) - Relation to the GPS matrix
Bibliography

Abstract

Specifies the metrological characteristics of a non-contact instrument for measuring surface texture using point autofocus probing.

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	International Organization for Standardization
Pages
ISBN
Committee	TC 213
Supersedes	ISO/DIS 25178-605 : 60.00 (2013)