Table of Contents

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 Procedure for probe characterization
6 Reporting of probe characteristics
Annex A (informative) - Dependence of AFM images on
        measurement mode and settings
Annex B (normative) - Reference sample preparation
Annex C (informative) - Example of a reference structure
Annex D (informative) - Results of EPSC measurement
        repeatability test
Annex E (informative) - Plane correction for probe shank
        profile analysis
Annex F (informative) - Example of a report
Bibliography

Abstract

Defines two methods for characterizing the shape of an AFM probe tip, specifically the shank and approximate tip profiles.

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	International Organization for Standardization
Pages
ISBN
Committee	TC 201
Supersedes	ISO/DIS 13095 : 60.00 (2014)