Table of Contents

Foreword
1 Scope
2 Normative references
3 Terms and definitions
4 Abbreviated terms
5 Experimental parameters
6 Procedures and measurements
7 Test report
Annex A (informative) - Methods of estimating analysis area
Annex B (informative) - Methods of estimating analysis depth
Annex C (informative) - Method of estimating X-ray analysis
        volume by applying the Monte Carlo (MC) simulation
Bibliography

Abstract

Provides the general guidelines for the determination of experimental parameters relating to the primary beam, the wavelength spectrometer and the sample that need to be taken into account when carrying out electron probe microanalysis.

General Product Information

Published
Document Type	Standard
Status	Current
Publisher	International Organization for Standardization
Pages
ISBN
Committee	TC 202
Supersedes	ISO/DIS 14594 : 60.00 (2014)